ESE Ph.D. Thesis Defense: “Co-Design of Resonators, Piezoelectric Materials, and Acoustic Modes for Timing, Communications, and Power Applications”
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Room 313, Singh Center for Nanotechnology
3205 Walnut Street, Philadelphia, PA, United States
The growing demand for high-performance frequency control and power conversion systems has intensified research interest in piezoelectric MEMS resonators. This thesis investigates three piezoelectric material systems, including aluminum nitride (AlN), aluminum scandium nitride (AlScN), and lithium niobate (LiNbO₃), operating in different acoustic modes: bulk acoustic wave (BAW), thickness shear (TS), and Lamb wave modes, By […]