Aluminum nitride (AlN) bulk acoustic wave (BAW) devices dominate acoustic filtering in the mobile market at 3 GHz and below along with surface acoustic wave (SAW) devices. However, the intrinsic electromechanical coupling coefficient of AlN limits the scaling of these BAW devices to higher frequencies to support the increased data processing demands of 5G and higher Wi-Fi communication bands. One way to address the limited electromechanical coupling coefficient of AlN, albeit at the cost of the material’s quality factor, is to alloy it with scandium to form scandium-alloyed AlN or aluminum scandium nitride (AlScN). This research work explores the realization of BAW resonators with higher electromechanical coupling coefficients using periodically polarized AlScN. The design, modeling, and characterization of wide-band BAW filters using single-layer and periodically polarized AlScN is also discussed.

Zoom link: https://upenn.zoom.us/j/94312165639?pwd=4QfHrbjzmlR9P2gBJTxQDUm7LALccD.1
Meeting ID: 943 1216 5639
Passcode: 192539